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64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra microinch / 0.25 micrometer surface finish and is available in Hastelloy® trim. Maximum flow rates are up to 31.8 SCFM / 900 SLPM, with inlet pressures of 150, 1000, 1500 psig / 10.3, 69.0, 103 bar and outlet pressures up to 200 psig / 13.8 bar. Ideal for use in Bulk Specialty Gas Systems (BSGS), 1/2" point-of-use, tool hook-ups and gas cabinets.
