Semiconductor manufacturing

Semiconductor Fabrication & Manufacturing

Emerson’s semiconductor manufacturing equipment & fabrication technology ensure high purity in the semiconductor fabrication process.

Boost Yield Rates with Semiconductor Fabrication Gas Delivery Technology

In critical semiconductor fabrication applications, the last thing you need is downtime. We understand the need to reduce contaminants and provide a reliable process to achieve optimal yield rates. At semiconductor fabrication plants and foundries across the world, Emerson’s semiconductor manufacturing equipment, fabrication technology and gas delivery system regulators are trusted to deliver superior performance. You can count on Emerson’s global network to provide localized support for your semiconductor fabrication process. 

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Areas of Expertise

Semiconductor fabricators depend on robust bulk specialty gas systems (BSGS) that can maximize throughput and production time through continuous delivery of specialty gases, at high volume and flow rates. Emerson’s regulators are designed to facilitate high-volume transmission from start to finish. Our products enable uptime and help provide a reliable, primary point of contact, while ensuring the transmission of high-volume throughput across your applications. 

End users depend on precise pressure control at gas distribution points that connect to manufacturing tools and applications. Emerson’s regulators provide superior pressure control between valve manifold boxes and process tools. Our technological designs help create a reliable, final point of contact that ensures quality, purity, and repeatability of the process, and help increase yields by reducing the number of products rendered defective by media contamination.

Gas cabinet systems depend on precise control of often hazardous media to safely and efficiently store them for use within semiconductor manufacturing systems. Emerson’s TESCOM regulators help ensure the integrity of this integral point in the gas distribution chain. By improving the operating interface and controls, our technology allows end users to streamline maintenance, reduce downtime and manage increased production schedules. 

Emerson’s TESCOM gas pressure regulators are optimized regulators to ensure a reliable, safe semiconductor gas delivery system across your fabrication facilities. Easy to use and install and versatile, with modular features ideal for changing or expanding production targets, these products support customized solutions and adapt to high-integrity standard applications. Our trusted, global network can provide localized support for highly specific application challenges.

The semiconductor manufacturing process depends on controlling airborne molecular contaminants (AMC) on production tools and semiconductor wafers, which is made more challenging by reduced wafer geometric footprints. Emerson’s solenoid technology delivers responsive, precise flow control and enables superior performance and reliability in nitrogen purging stations, which helps reduce maintenance and downtime while increasing throughput.

The challenge of high throughput and reliability standards have made semiconductor manufacturing dependent on system intelligence and communication. Emerson’s precision controls of temperature, flow, pressure and position are supported by sophisticated IIoT capabilities that touch all elements of the handling system. Our solutions provide consistent communication to the valve and enable integration of the web server in the most demanding semiconductor manufacturing applications.

Frequently Asked Questions about Semiconductor Fabrication and Manufacturing

How can Emerson help me achieve high semiconductor fabrication yield rates?
Why is it necessary to digitize semiconductor fabrication facilities?
What is semiconductor manufacturing?
How can real-time data support preventative maintenance in semiconductor fabrication?
Why is sustainability critical to the semiconductor fabrication process?
How can Emerson help you ensure chip performance and reliability?
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