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Tescom-P-64-3600

TESCOM™ 64-3600 Series Highly Sensitive Pressure Regulator

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Product Description

64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.

Specifications

Pressure Rating
Maximum Inlet Pressure: 600 or 3500 psig / 41.4 or 241 bar
Outlet Pressure Ranges: 30, 60, 100, 150 psig / 2.1, 4.1, 6.9, 10.3 bar
Body Material
316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish
Diaphragm
Hastelloy®
Valve Seat
PCTFE, Teflon PFA® or Vespel®
Stem & Valve Spring
316 Stainless Steel
Remaining Parts
316 Stainless Steel or Hastelloy®
Operating Temperature
Teflon® PFA Seat: -40 to 160°F / -40 to 71°C
Vespel® Seat: -40 to 350°F / -40 to 177°C
PCTFE Seat: -40 to 140°F / -40 to 60°C
Port Size & Type
1/4, 1/2
Male Swivel, Female Swivel, Male Fixed, HPIC
1/4 Tube Stubs
Flow Capacity
Cv = 0.15 or 0.06
Weight
2 lbs / 0.9 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.

Features

  • 10 Ra microinch / 0.25 micrometer internal surface finishes
  • Metal-to-metal seal (diaphragm to body seal for high leak integrity)
  • Full internal electropolish is available
  • Designed to reduce pressure fluctuations in semiconductor gas systems
  • Meets the stringent semiconductor requirements of both point-of-use and
  • cylinder applications

Documents & Drawings